Unique features

– Film thickness up to 60 μm and higher
– High intensity laser exposure possible without outgassing
– 50 - 60 μm depth range of the patterns possible
– Aqueous alkaline development with TMAH based developers
– High stability in plating baths

Applications

Use of manufactured 3D patterns in micro-optics, MEMS and MOEMS, displays
Pattern transfer by
– electroplating
– etching 

– UV moulding