제품 기본설명
Epitaxy Ready Polished Wafers
제품 상세설명
| Wafer Specifications | |||
| 2" diameter | 3" diameter | 4" diameter | |
|---|---|---|---|
| Orientation | (111)A or B ±0.1° | (111)A or B ±0.1° | (111)A or B ±0.1° |
| Misorientations up to 10° in any direction are available. | |||
| For other orientations and directions please ask. | |||
| Diameter | 50.5±0.5mm | 76.2±0.4mm | 100±0.5mm |
| Flat Option | 2 flats at 120° | 2 flats at 120° | 2 flats at 120° |
| Flat orientation tolerance |
±0.1° | ±0.1° | ±0.1° |
| Major flat length |
16±2mm on (01-1) | 22±2mm on (01-1) | 32.5±2.5mm on (01-1) |
| Minor flat length |
8±1mm (1-10) | 11±1mm (1-10) | 18±1mm (1-10) |
| Thickness/µm | 625±25µm | 800 or 900±25µm | 1000±25µm |
| Lasermark | Back surface parallel to the major flat | ||
관련제품
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