product
Semicon Division

mr-I 9000M 요약정보 및 구매

thermally curing nanoimprint lithography series

상품 선택옵션 0 개, 추가옵션 0 개

제조사 MicroResist Technology
원산지 Germany
브랜드 mr-I 9000M series
모델 mr-I 9010M~9100M

제품 기본설명

thermally curing nanoimprint lithography series

제품 상세설명

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99b42643e239e4fe538f21e13674fa69_1457318

▣ Application by spin coating,  film thickness 300 nm – 1 μm 

▣ Simultaneous imprint of nano and micropatterns
▣ Thermal curing during imprint
▣ Isothermal mould detachment (no cooling phase)
▣ Excellent pattern transfer fidelity

▣ Thermal stability of imprinted patterns up to 260 °C
 

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