제품 기본설명
Thermoset for Pattern Transfer series
제품 상세설명
▣ Excellent film quality
▣ Tg 35 °C (before curing)▣ Nearly isothermal imprint process: Imprint temperature 120 °C, Mould release at 100 °C
▣ Curing and increase in Tg to Tg,cured during imprint
▣ Imprint pressure 50 bar
▣ Very low residual layer thickness down to 5 nm
▣ Excellent pattern transfer fidelity
▣ Plasma etch resistance comparable to conventional novolak-based photoresists
▣ Attainable smallest feature size at least 50 nm (depending on mould resolution)
관련제품
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