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Spin Module
SM-150(BT & BM), SM-200(Cabinet & BM), SM-300(Cabinet & BM) -
Combined System
SM-200/HP-200, SMD-200/HP-200, SMD-200-E/HP-200 -
Spray Coater
iSPRAY-300 Cabinet -
Developer / Etcher
SMD-200(Cabinet & BM), SMD-300(Cabinet & BM), SMD-200-E(Cabinet & BM), SMD-300-E(Cabinet & BM) -
Spin Rinse Dryer
SRD-150-4S, SRD-200 -
Cluster System
Sirius, Pioneer, Explorer, Orbiter -
Ga2O3 substrate & epitaxial wafers
2"/rectangular sub, MBE/HVPE epi -
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Wafer Bonding Inspection Device
WBI 100/150/200 -
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IR Wafer Inspection Microscope
IRM 100/200 -
HF Vapor Phase Etcher
VPE 100/150/200 -
Micro Wave Leakage Meter
MM3001A/B, MLT 5/441 -
Magnetron
915~5800 MHz -
MP-Power Supplies
MP1003G/050KE -
MC-High Ripple
MC1000B~3000B -
MT-High Ripple
MW-PIRE, MT1250B/2000D -
ML-Low Ripple
MG0500D , ML1250D~3000D -
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Plasma Decapsulation Tool
MA3000D-151BB -
Sillicon Etcher Tool
SAN 1010 -
STP COMPACT
STP COMPACT -
Stripping Tool
STP 2020 -
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Air & Water Gun
Air & Water Gun -
nSPEC
nSPEC -
Die Handling Tool
C001/2/3, F001/2/3
